A196-60MLB-47C02 Entegris 150mm (6") 25 slot PEEK+CF High Temp Wafer Carrier

Description

A196-60MLB-47C02:
Entegris / Fluoroware 150mm (6") 25 slot PEEK+CF material Wafer Carrier
25 slot,
PEEK+CF (STAT-PRO 3000) material wafer carrier
for handling and high temp processing o
f
150mm (6") x up to 1mm (0.039")
silicon, sapphire, II-VI, III-V wafers -or- glass, optical and other single crystal substrates
.
Compatible with: Entegris / Fluroware  K196-60MLB-97C02  -and-  F
A196B-60MLB-7902
Substitute for: ePAK  ePB-6/150-25-R.2-N-eM-47-BLK -or- 170-BLK  (eWB0101-N-eM-
47-BLK -or-
170-BLK
)
Refurbished parts are inspected, measured compared to SEMI specs or original drawing,
washed and rinsed in RO water, HEPA air dried, packed in clean-room bag.
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